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Plano-eucentric photometry system for micro-display metrology
Lamvik, M., & Grego, S. (2005). Plano-eucentric photometry system for micro-display metrology. SID International Symposium Digest of Technical Papers, 36(1), 542-546. https://doi.org/10.1889/1.2036495
We describe a unique micro-display metrology system in which the stage can be rotated arbitrarily and the area of interest does not leave the field of view. Similarly, the sample can be tilted up to 60 degrees and the area of interest stays continuously in focus. The mechanism operates instantaneously and does not depend on computers or motors to achieve correct centering. This capability facilitates the rapid measurement of micro-display characteristics over a wide range of angles.