Methods are provided for creating a metal or other electrically-conductive member extending from an air-backed cavity of a piezoelectric ultrasonic transducer (pMUT) apparatus defining such an air-backed cavity, through a substrate layer disposed adjacent to the transducer device of the pMUT device, and into electrically-conductive engagement with a first electrode of the pMUT device, such that the electrically-conductive member provides an electrically-conductive engagement between the first electrode and a conformal electrically-conductive layer deposited in the air-backed cavity of the pMUT device. Associated apparatuses are also provided.
Piezoelectric ultrasonic transducer apparatus
Dausch, D. (2014). IPC No. U.S. Piezoelectric ultrasonic transducer apparatus. (U.S. Patent No. 8710717). http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8710717