• Article

Fabrication of Column-Based Silicon Field Emitter Arrays for Enhanced Performance and Yield

Citation

Temple, D., Ball, CA., Palmer, WD., Yadon, L., Vellenga, D., Mancusi, J., ... Gray, HF. (1995). Fabrication of Column-Based Silicon Field Emitter Arrays for Enhanced Performance and Yield. Journal of Vacuum Science & Technology B, 13(1), 150-157.