• Journal Article

"Effect of film chemistry on refractive index of plasma enhanced chemical vapor deposition silicon oxynitride films: a correlative study"

Citation

Naskar, S., Wolter, S., Bower, C., Stoner, B., & Glass, J. (2008). "Effect of film chemistry on refractive index of plasma enhanced chemical vapor deposition silicon oxynitride films: a correlative study". Journal of Materials Research, 23(5), 1433 - 1442.

Abstract