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Fabrication and characterization of metal-to-metal interconnect structures for 3-D integration
Huffman, A., Lannon, J., Lueck, M., Gregory, C., & Temple, D. (2009). Fabrication and characterization of metal-to-metal interconnect structures for 3-D integration. In Materials and Technologies for 3-D Integration (pp. 1112 - E02-05)