• Conference Proceeding

Wafer Bonding of diamond films to silicon for silicon-on-insulator technology

Citation

Yushin, G., Wolter, S., Kvit, A., Collazo, R., Sitar, Z., Prater, J., & Stoner, B. (2001). Wafer Bonding of diamond films to silicon for silicon-on-insulator technology. In Proceedings of the Materials Research Society, Symposium A: Materials Issues in Novel Si-based Technologies,.

Abstract