• Conference Proceeding

Thin-Film Tantalum-Nitride Resistor Technology for Phosphide-Based Optoelectronics

Citation

Lovejoy, M. L., Patrizi, G. A., Rieger, D. J., Barbour, J. C., & Enquist, P. M. (1996). Thin-Film Tantalum-Nitride Resistor Technology for Phosphide-Based Optoelectronics. In Proceedings of the 1996 International Conference on Metallurgical Coatings and Thin-Films,San Diego, CA: .

Abstract