• Journal Article

Selective-Area Chemical-Vapor-Deposition of Silicon by the Alternating Cyclic Method - A Thermodynamic Analysis

Citation

Wang, Q. S., Reisman, A., & Temple, D. (1994). Selective-Area Chemical-Vapor-Deposition of Silicon by the Alternating Cyclic Method - A Thermodynamic Analysis. Journal of the Electrochemical Society, 141(2), 593-602.

Abstract