• Journal Article

Measurement of Moisture and Total Hydrocarbon Contributions by Valves Used in Clean Room Gas-Delivery Systems

Citation

Periasamy, R., Newsome, J., Ensor, D., Donovan, R., & Riddle, J. (1994). Measurement of Moisture and Total Hydrocarbon Contributions by Valves Used in Clean Room Gas-Delivery Systems. Journal of the Electrochemical Society, 141(6), 1653-1657.

Abstract

Moisture and total hydrocarbon (THC) emissions from valves used in clean room gas-distribution systems were measured by following two test methods developed recently by SEMATECH. Each test method consists of two types of tests: a purge test and a bakeout test. The apparatus specified in each test method is similar except for the detector. Simply by switching the detectors, the same apparatus may be used for both test methods. We report measurements of THC and moisture made with this apparatus and carried out on both manual and automatic all metal stainless steel valves with either Kel-F(R) or tetrafluoroethylene gaskets, some new (fresh out of the bag) and some used