Integrated Force Arrays: Theory and Modeling of Static Operation

Scott H. Goodwin; Lindsey Neal Yadon; J Jacobson; Scott H. Goodwin; S Bobbio; C Bartlett; Lindsey Neal Yadon

Integrated Force Arrays: Theory and Modeling of Static Operation

Jacobson, J., Goodwin, S., Bobbio, S., Bartlett, C., & Yadon, L. (1995). Integrated Force Arrays: Theory and Modeling of Static Operation. Journal of Microelectromechanical Systems, 4, 139-50.

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