Formation of Aluminum-Oxide Films from Aluminum Hexafluoroacetylacetonate at 350-450-Degrees C

Dorota S. Temple; Dorota S. Temple; Arnold Reisman

Formation of Aluminum-Oxide Films from Aluminum Hexafluoroacetylacetonate at 350-450-Degrees C

Temple, D., & Reisman, A. (1990). Formation of Aluminum-Oxide Films from Aluminum Hexafluoroacetylacetonate at 350-450-Degrees C. Journal of Electronic Materials, 19(9), 995-1002.

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