• Journal Article

Fabrication and characterization of metal-to-metal interconnect structures for 3-D integration

Citation

Huffman, C., Lannon, J., Lueck, M., Gregory, C., & Temple, D. (2009). Fabrication and characterization of metal-to-metal interconnect structures for 3-D integration. Journal of Instrumentation, 4(Art. No.P03006).

Abstract