Effect of Rf Power on Remote-Plasma Deposited Sio2-Films

Dorota S. Temple; SV Hattangady; Randall Alley; G Fountain; R Markunas; G Lucovsky; Dorota S. Temple

Effect of Rf Power on Remote-Plasma Deposited Sio2-Films

Hattangady, SV., Alley, R., Fountain, G., Markunas, R., Lucovsky, G., & Temple, D. (1993). Effect of Rf Power on Remote-Plasma Deposited Sio2-Films. Journal of Applied Physics, 73(11), 7635-7642.

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