• Journal Article

Effect of Rf Power on Remote-Plasma Deposited Sio2-Films

Citation

Hattangady, S. V., Alley, R., Fountain, G., Markunas, R., Lucovsky, G., & Temple, D. (1993). Effect of Rf Power on Remote-Plasma Deposited Sio2-Films. Journal of Applied Physics, 73(11), 7635-7642.

Abstract