• Patent

Durable plasma treatment apparatus and method

A method and apparatus for treating a work surface, whereinthere is provided a chamber having a longitudinal axis andlongitudinally extending electrically conductive sidewalls, atleast one sidewall having at least one longitudinally extending gapthat interrupts a current path through the sidewalls transverse tothe longitudinal axis, and wherein the chamber is sealed to allowpressure inside the chamber to be controlled. Also provided is anaxially-extending array of current-carrying conductors which atleast partially encircle the chamber, are transverse to thelongitudinal axis, and establish a magnetic field parallel to thelongitudinal axis of the chamber, and a power supply connected tothe conductor array and adapted to provide high-frequency currentin the conductors to magnetically induce ionization of the gaseousmaterial in the chamber and form a plasma sheath that surrounds andextends along the longitudinal axis and conforms to the sidewallsof the chamber, and wherein the work surface is exposed to theplasma sheath and extends in the direction of the longitudinalaxis.

Citation

Robson, A. E., Rudder, R., Hendry, R., David, M. M., & Burt, J. V. (2000). IPC No. U.S.Durable plasma treatment apparatus and method (Patent No. 6105518.)