The effects of relative positions of the monomer inlet and the r.f. coil, and of the inlet and outlet, on the distribution of polymer deposition in plasma polymerization of ethylene were investigated using an electrodeless glow discharge by a 13.5-MHz radiofrequency source. The diffusional transport of active species created under the r.f. coil, diffusional transport of polymer forming species, and flow of gas in the system are important factors that determine the distributions of polymer deposition observed in plasma polymerization of ethylene. The mechanisms of polymer deposition are discussed in conjunction with postulated plasma polymerization mechanisms.
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