• Journal Article

Differences in Surface Erosion of Silicon-Wafers Annealed in Si-Loaded, Sic-Coated and Pure Sic Carriers

Citation

Reisman, A., & Temple, D. (1991). Differences in Surface Erosion of Silicon-Wafers Annealed in Si-Loaded, Sic-Coated and Pure Sic Carriers. Journal of the Electrochemical Society, 138(5), L1-L3.

Abstract