• Journal Article

On-chip electron-impact ion source using carbon nanotube field emitters

Citation

Bower, C., Gilchrist, K., Piascik, J., Stoner, B., Natarajan, S., Parker, C. B., ... Glass, J. T. (2007). On-chip electron-impact ion source using carbon nanotube field emitters. Applied Physics Letters, 90(12), 124102. DOI: 10.1063/1.2715457

Abstract

A lateral on-chip electron-impact ion source utilizing a carbon nanotube field emission electron source was fabricated and characterized. The device consists of a cathode with aligned carbon nanotubes, a control grid, and an ion collector electrode. The electron-impact ionization of He, Ar, and Xe was studied as a function of field emission current and pressure. The ion current was linear with respect to gas pressure from 10?4 to 10?1 Torr. The device can operate as a vacuum ion gauge with a sensitivity of approximately 1 Torr?1. Ion currents in excess of 1 µA were generated. ©2007 American Institute of Physics