Chemical Vapor-Deposition of Copper from Copper (Ii) Hexafluoroacetylacetonate

Dorota S. Temple; Dorota S. Temple; Arnold Reisman

Chemical Vapor-Deposition of Copper from Copper (Ii) Hexafluoroacetylacetonate

Temple, D., & Reisman, A. (1989). Chemical Vapor-Deposition of Copper from Copper (Ii) Hexafluoroacetylacetonate. Journal of the Electrochemical Society, 136(11), 3525-3529.

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