Cantilever-based MEMS optical scanning apparatus, system and method
The present invention relates to an optical scanning apparatus and an optical scanning system The optical system includes an optical engine connected to an optical scanning probe The optical scanning probe images a sample at different lateral positions of the sample The optical scanning probe includes a housing having a longitudinal axis extending in a direction towards a sample to be scanned, a first base having a first moveable mirror supported thereon by a first cantilever connecting the first moveable mirror to the first base, a second base having a second moveable mirror supported thereon by a second cantilever connecting the second moveable mirror to the second base, and a support attaching the first and second bases so that the first moveable mirror and the second moveable mirror are disposed along the longitudinal axis apart from each other.
Grego, S., Gilchrist, K., Dausch, D., & Lamvik, M. (2014). IPC No. U.S.Cantilever-based MEMS optical scanning apparatus, system and method (Patent No. 8700134.)