Staring infrared focal plane arrays (FPAs) require pixel-level, three-dimensional (3D) integration with silicon readout integrated circuits (ROICs) that provide detector bias, integrate detector current, and may further process the signals. There is an increased interest in ROIC technology as a result of two trends in the evolution of infrared FPAs. The first trend involves decreasing the FPA pixel size, which leads to the increased information content within the same FPA die size. The second trend involves the desire to enhance signal processing capability at the FPA level, which opens the door to the detector behaving like a smart peripheral rather than a passive component—with complex signal processing functions being executed on, rather than off, the FPA chip. In this paper, we review recent advances in 3D integration process technologies that support these key trends in the development of infrared FPAs. Specifically, we discuss approaches in which the infrared sensor is integrated with 3D ROIC stacks composed of multiple layers of silicon circuitry interconnected using metal-filled through-silicon vias. We describe the continued development of the 3D integration technology and summarize key demonstrations that show its viability for pixels as small as 5 microns.
Advances in three-dimensional integration technologies in support
Temple, D., Vick, E., Malta, D., Lueck, M., Skokan, M., Masterjohn, C., & Muzilla, M. (2015). Advances in three-dimensional integration technologies in support. Proceedings of SPIE, 9370, 93701L-1 - 93701L-7. https://doi.org/doi: 10.1117/12.2082877
Abstract
Publications Info
To contact an RTI author, request a report, or for additional information about publications by our experts, send us your request.
Meet the Experts
View All ExpertsRecent Publications
Article
What's in a name? A data-driven method to identify optimal psychotherapy classifications to advance treatment research on co-occurring PTSD and substance use disorders
Article
Grandi Byen-supporting child growth and development through integrated, responsive parenting, nutrition and hygiene
Article
Effects of additional context information in prescription drug information sheets on comprehension and risk and efficacy perceptions
Patent