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Dorota Temple

Senior Fellow, Electronics and Applied Physics

Dorota Temple, PhD, is internationally known for her research on field-emission electron sources and for her contributions to the development of three-dimensional (3D) integration technologies for advanced sensors. She has more than 25 years of experience in the area of semiconductor devices and process technology. She is currently the Principal Investigator for a portfolio of projects pertaining to 3D wafer-level microsystem integration, flexible electronics, and multispectral imaging sensors. She has authored or co-authored more than 150 publications, including several books and invited review papers, and holds seven U.S. patents.


PhD, Solid State Physics, AGH University of Science and Technology (Cracow, Poland); MS, Solid State Physics, AGH University of Science and Technology.

Latest Publications

Williams, C.K., Bower, C.A., Malta, D.M., & Temple, D. (2015). Three dimensional interconnect structure and method thereof.
Temple, D.S., Lueck, M.R., Malta, D., & Vick, E.P. (2015). Scaling of three-dimensional interconnect technology incorporating low temperature bonds to pitches of 10 ┬Ám for infrared focal plane array applications. Japanese Journal of Applied Physics, 54 (3):030202.
Bower, C.A., Gilchrist , K.H., Stoner, B.R., & Temple, D. (2014). Faraday cup array integrated with a readout IC and method for manufacture thereof.
Lannon, J., Hilton, A., Huffman, A., Butler, M., Malta, D., Gregory, C., & Temple, D. (2014). Fabrication and Testing of a TSV-Enabled Si Interposer With Cu- and Polymer-Based Multilevel Metallization. Ieee Transactions on Components Packaging and Manufacturing Technology, 4 (1):153-157.
View all publications by Dorota Temple (112)


  • 3-D Integration
  • Energy Technology
  • Electronic Materials
  • Semiconductor Processing