Comparative study of Ni nanowires patterned by electron-beam lithography and fabricated by lift-off and dry etching techniques

Dorota S. Temple; YD Park; KB Jung; M Overberg; Dorota S. Temple; SJ Pearton; PH Holloway

Comparative study of Ni nanowires patterned by electron-beam lithography and fabricated by lift-off and dry etching techniques

Park, YD., Jung, KB., Overberg, M., Temple, D., Pearton, SJ., & Holloway, PH. (2000). Comparative study of Ni nanowires patterned by electron-beam lithography and fabricated by lift-off and dry etching techniques. Journal of Vacuum Science & Technology B, 18(1), 16-20.

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