Deposition and characterization of undoped and boron and phosphorus doped (SixGe1-xO2) glass films

Dorota S. Temple; Charles K. Williams; DL Simpson; RT Croswell; Arnold Reisman; Ken Williams; Dorota S. Temple

Deposition and characterization of undoped and boron and phosphorus doped (SixGe1-xO2) glass films

Simpson, DL., Croswell, RT., Reisman, A., Williams, CK., & Temple, D. (2000). Deposition and characterization of undoped and boron and phosphorus doped (SixGe1-xO2) glass films. Journal of the Electrochemical Society, 147(4), 1560-1567.

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