A Thermodynamic Analysis of Selective-Area Cvd of Titanium Nitride Compound by the Alternating Cyclic Method

Wang, QS., Reisman, A., & Temple, D. (1994). A Thermodynamic Analysis of Selective-Area Cvd of Titanium Nitride Compound by the Alternating Cyclic Method. Journal of the Electrochemical Society, 141(4), 1086-1094.

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