• Conference Proceeding

Micro-electro-mechanical Actuator with Extended Range and Enhanced Force: Fabrication, Test, and Application as a Mechanical Scanner

Citation

Bobbio, S., Smith, S., Zara, J., Goodwin-Johansson, S., Hudak, J., DuBois, T., ... Pennington, M. (1999). Micro-electro-mechanical Actuator with Extended Range and Enhanced Force: Fabrication, Test, and Application as a Mechanical Scanner. In Smart Structures and Materials 1999: Smart Electronics and MEMS, [3673], pp. 210–218. .

Abstract