A method is provided for forming a piezoelectric ultrasonic transducer apparatus having a first electrode deposited on a dielectric layer disposed on a primary substrate. A piezoelectric material is deposited between the first electrode and a second electrode, to form a transducer device. At least the piezoelectric material is patterned such that a portion of the first electrode extends laterally outward therefrom. The primary substrate and the dielectric layer are etched to form a first via extending to the laterally outward portion of the first electrode, and a first conductive material is deposited to substantially fill the first via and form an electrically-conductive engagement with the laterally outward portion of the first electrode. The primary substrate is etched to define a second via extending therethrough, wherein the second via is laterally spaced apart from the first via. An associated method and apparatus are also provided.
Method for forming an ultrasonic transducer, and associated apparatus
Dausch, D., & Goodwin, S. (2014). Method for forming an ultrasonic transducer, and associated apparatus. (U.S. Patent No. 8692441). http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8692441