• Journal Article

High voltage microelectromechanical systems platform for fully integrated, on-chip, vacuum electronic devices

Citation

Natarajan, S., Parker, C. B., Glass, J. T., Piascik, J., Gilchrist, K., Bower, C. A., & Stoner, B. (2008). High voltage microelectromechanical systems platform for fully integrated, on-chip, vacuum electronic devices. Applied Physics Letters, 92(22), 224101. DOI: 10.1063/1.2938075

Abstract

We demonstrate a fully integrated, on-chip, vacuum microtriode capable of handling voltages up to 800 V. The ability to operate at such high voltages is achieved by the addition of a 10 µm thick silicon dioxide layer to the device. The device is fabricated using microelectromechanical systems fabrication principles and utilizes carbon nanotubes as field emitters. A dc amplification factor of 600 was obtained. This is the highest value reported for carbon nanotube-enabled microtriode devices. The high voltage capability of these microscale devices will enable their use in a wider variety of applications. ©2008 American Institute of Physics