• Journal Article

The effect of deposition interruption and substrate bias on the structure of sputter deposited yttria-stabilized zirconia thin-films

Citation

Ruddell, D., & Stoner, B. (2002). The effect of deposition interruption and substrate bias on the structure of sputter deposited yttria-stabilized zirconia thin-films. Journal of Vacuum Science & Technology A, A 20(5), 1744-48.

Abstract