• Journal Article

Cu Cvd from Copper(Ii) Hexafluoroacetylacetonate .1. A Cold-Wall Reactor Design, Blanket Growth-Rate, and Natural Selectivity

Citation

Chen, Y. D., Reisman, A., Turlik, I., & Temple, D. (1995). Cu Cvd from Copper(Ii) Hexafluoroacetylacetonate .1. A Cold-Wall Reactor Design, Blanket Growth-Rate, and Natural Selectivity. Journal of the Electrochemical Society, 142(11), 3903-3911.

Abstract