• Presentation

Correlation between growth parameters, optical properties, and material chemistry of thick silicon oxynitride films

Citation

Naskar, S., Bower, C., Yadon, L., Wolter, S., Glass, J., & Stoner, B. (2004, November). Correlation between growth parameters, optical properties, and material chemistry of thick silicon oxynitride films. Presented at MRS Society Annual Meeting, .

Abstract