• Article

Comparative study of Ni nanowires patterned by electron-beam lithography and fabricated by lift-off and dry etching techniques

Citation

Park, YD., Jung, KB., Overberg, M., Temple, D., Pearton, SJ., & Holloway, PH. (2000). Comparative study of Ni nanowires patterned by electron-beam lithography and fabricated by lift-off and dry etching techniques. Journal of Vacuum Science & Technology B, 18(1), 16-20.