Trace Contaminant Testing of Cleanroom High-Purity Gas Distribution Components
Mass flow controllers, filters, valves, pressure regulators, and gauges
On behalf of manufacturers and end-users, we test gas-handling devices – mass flow controllers, pressure regulators, filters, valves, and gauges – used in high-purity applications such as microelectronics manufacturing. We assess the purity of these components to determine whether they introduce particulate or gaseous contaminants into the manufacturing process. Particles as small as 10 nm are detectable, and moisture, oxygen, and hydrocarbons are measured to part-per-billion (ppb) levels. Filter efficiency testing to 9 log retention units for small point-of-use filters can be performed.
These tests follow methods that RTI had a major role in developing. They were sponsored and approved by SEMATECH, an international research consortium dedicated to accelerating development of semiconductor manufacturing technologies. The American Society for Testing and Materials (ASTM) has adopted oversight and maintenance of some of the test methods. Semiconductor Equipment and Materials International (SEMI) provides updates on others.
Focus Areas
- Particle, moisture, hydrocarbon and oxygen contamination and emission
- Gas-handling devices: filters, valves, regulators, mass flow controllers, gauges, tubing
- Microchip manufacturing
- Helium leak testing
- Valve life-cycle testing
- Filter efficiency for point-of-use filters
Capabilities
- Standard test methods: SEMASPEC, ASTM, SEMI
- Nonstandard (custom) testing based on standard tests with interpretation
- Adaptation of tests for nonstandard or developmental components
- Independent, unbiased, confidential third-party product assessments
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