Microelectromechanical Systems (MEMS)

We develop new integrated materials based on microfabrication and microelectromechanical systems (MEMS) technology, and identify innovative applications for next-generation microsensors and microactuators. A number of our unique devices have the potential to make current state-of-the-art components obsolete.

For example, our MEMS microvalves could replace standard solenoid valves, providing longer lifetime and lower power consumption. We are developing miniaturized ultrasound transducers that can be embedded in the tip of intravascular catheters to provide surgical teams with real-time patient imaging.

Focus Areas

Capabilities

Projects

Production Facilities and Equipment

6-inch wafer fabrication laboratory
2,600 square feet of Class 1000 clean room space
End-to-end capabilities for design, fabrication, packaging, testing, and reliability

Analytical Tools and Equipment

Scanning electron microscopy (SEM)
Transmission electron microscopy (TEM)
Energy dispersive spectroscopy (EDX/EDS)
Atomic force microscopy (AFM)
Auger electron spectroscopy (AES)

X-ray photoelectron spectroscopy (XPS)
X-ray imaging
X-ray fluorescence spectroscopy (XRF)
Profilometery
Ellipsometry

MEMS and Semiconductor Test Equipment

Wafer probing stations
Semiconductor parameter analyzers
Ferroelectric testing workstation
Environmental control chambers

Patents

U.S. Patent 7,026,602: Electromagnetic radiation detectors having a microelectromechanical shutter device
U.S. Patent 6,972,889: MEMS electrostatically actuated optical display device and associated arrays
U.S. Patent 6,731,492: Overdrive structures for flexible electrostatic switch
U.S. Patent 6,700,309: Miniature electrical relays using a piezoelectric thin film as an actuating element
U.S. Patent 6,590,267: Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
U.S. Patent 6,586,738: Electromagnetic radiation detectors having a micromachined electrostatic chopper device
U.S. Patent 6,545,329: High sensitivity polarized light discriminator device
U.S. Patent 6,485,273: Distributed MEMS electrostatic pumping devices
U.S. Patent 6,456,420: Microelectromechanical elevating structures
U.S. Patent 6,396,620: Electrostatically actuated electromagnetic radiation shutter
U.S. Patent 6,373,682: Electrostatically controlled variable capacitor
U.S. Patent 6,359,374: Miniature electrical relays using a piezoelectric thin film as an actuating element
U.S. Patent 6,236,491: Micromachined electrostatic actuator with air gap
U.S. Patent 6,229,683: High voltage micromachined electrostatic switch
U.S. Patent 6,057,520: Arc resistant high voltage micromachined electrostatic switch
U.S. Patent 5,740,258: Active noise suppressors and methods for use in the ear canal
U.S. Patent 5,479,061: Pleated sheet microelectromechanical transducer
U.S. Patent 5,434,464: Unidirectional supporting structure for microelectromechanical transducers
U.S. Patent 5,290,400: Fabrication method for microelectromechanical transducer
U.S. Patent 5,206,557: Microelectromechanical transducer and fabrication method

Related Research

3-D Microsystem Integration

David E. Dausch
dausch rti.org
919-248-1412